PPR100, PPR200, PPR300
Vacuum Process Monitoring Systems

  • 0.01, 0.1, 1.0 or 10 Torr inlet pressure
  • 3 ´ 10-5 Torr-L/s flow rate
  • 2 second response time (0.1 Torr)
  • 100, 200 or 300 amu systems
  • Field-replaceable electron multiplier and filament
  • 6 orders of magnitude dynamic range
  • RGA Windows software
click to enlarge
RGA

click to enlarge
Analyzer Rear Panels