CIS100, CIS200 & CIS300
Closed Ion Source Gas Analyzers

  • 100, 200, and 300 amu systems
  • 1 ppm detection
  • 10 mTorr max. operating pressure
  • 1 x 10-12 Torr detection limit
  • Real-time RGA Windows software
  • Multi-head operation
  • Field-replaceable electron multiplier and filament
  • RGA and CIS mode
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CIS Analyzer

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Analyzer Rear Panels